On 10/15/2023 2:37 PM, John Larkin wrote:
https://www.theregister.com/2023/10/13/canon_nanoimprint_litho/
That would be cool, go directly from e-beam to tiny stamps without all those tin droplets and optics.
"[...] physically pressing a mask imprinted with a circuit design onto
the resist layer [...]", without needing optics.
Wait ... how do you make the mask?
https://www.theregister.com/2023/10/13/canon_nanoimprint_litho/
That would be cool, go directly from e-beam to tiny stamps without all
those tin droplets and optics.
On 10/15/2023 2:37 PM, John Larkin wrote:
https://www.theregister.com/2023/10/13/canon_nanoimprint_litho/
That would be cool, go directly from e-beam to tiny stamps without all
those tin droplets and optics.
"[...] physically pressing a mask imprinted with a circuit design onto
the resist layer [...]", without needing optics.
Wait ... how do you make the mask?
On Mon, 16 Oct 2023 09:34:59 -0400, Bob Engelhardt
<BobEng...@comcast.net> wrote:
On 10/15/2023 2:37 PM, John Larkin wrote:
https://www.theregister.com/2023/10/13/canon_nanoimprint_litho/
That would be cool, go directly from e-beam to tiny stamps without all
those tin droplets and optics.
"[...] physically pressing a mask imprinted with a circuit design onto
the resist layer [...]", without needing optics.
Wait ... how do you make the mask?Direct e-beam. Ebeam is how masks are made.
Chips can be made with e-beam lithography, but it's too slow for production.
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